The CNS facility has RF (ground-signal-ground) probes for devices with 150 micrometer pitch. Testing of other device pitches may be possible, however for this, please contact the facility manager.
Desert Cryogenics Tabletop high frequency probe station and Electromagnet
This probe station has dc and rf probing capability between 0-40 GHz (see the facility manager if 50 GHz probing is necessary). The system is turbo-pumped to enable cryogenic sample temperatures. The unit accepts a 50 mm (2") diameter substrate and can analyze a 50 mm x 50 mm region with any of four dc/ rf probes. Sample temperature range is 4 to 400 K with excellent temperature stability. Probes are cooled and a Lakeshore 331 temperature controller measures sample and probe temperatures. A high resolution microscope with CCD camera and color monitor facilitates probe placement and has 3 micrometer ultimate resolution.
Added in 2003 is a bipolar electromagnet capable of 0.1 Tesla to enable low-temperature probing of thin films with an in-plane magnetic field.
Desert Cryogenics Full-wafer high frequency probe station
This probe station is similar to the tabletop unit above with the capability to accept a full 100 mm (4") diameter substrate can probe the entire surface with any of six dc/ rf probes. Sample temperature range is 4 to 375 K with excellent temperature stability. Probes are cooled and a Lakeshore 340 temperature controller measures sample, probe, and sample shield temperatures. A high resolution microscope with CCD camera and color monitor facilitates probe placement and has 3 micrometer ultimate resolution.
Also available is an optical fiber probe arm that is interchangeable with existing probes.
GMW 5403 variable gap (0-76 mm) dipole electromagnet enables magnetic measurements between 0-1.2 Tesla. The system is also equipped with an optical microscope, rf and dual-dc Cascade probes for room temperature electrical measurements. Samples can be wire-bonded and placed in a heater/cryostat for 1.5-475 K measurements.
GMW Projected Field Magnet
The GMW 5201 projected field magnet projects a magnetic field above the vacuum chuck of <3500 Gauss. Devices are tested using dc/rf Cascade probes. The magnet can be positioned with linear and rotary stepper motors separate from the sample. This allows probing of thin film devices with virtually any magnetic field vector from in-plane to out-of-plane.Back to the Top